| 摘要 |
<p>PURPOSE:To obtain the detector which has high sensitivity and small sensitivity variance and is inexpensive and superior in shock resistance by providing cut parts in a ceramic substrate which has high resistivity, a low Young's modulus, and high toughness and forming a deformation part at its periphery. CONSTITUTION:The substrate is made of ceramic which has >=1X10<10> OMEGA-cm resistivity, a <=3.5X10<4> Young's modulus, and >=3.5MN/m<3/2> rupture toughness and the periphery is fixed to a case 1 through a fixed part 8. Further, two cut holes 10 are bored in the substrate 2 symmetrically about the center, and the uncut part between the holes 10 form the deformation part 2a; and the outer peripheral part constitutes a nondeformation part 2b and a strain gauge 4 is formed on one surface of the former. Consequently, the substrate 2 is easily and accurately positioned and the deformation performance of the deformation part 2a is constant; and the sensitivity is prevented from varying owing to a position shift at the time of assembly and breakage due to an impact load is suppressed.</p> |
