| 摘要 |
<p>A bistable deformable mirror device (DMD) pixel architecture is disclosed, wherein the torsion hinges are placed in a layer different from the torsion beam layer. This results in pixels which can be scaled to smaller dimensions while at the same time maintaining a large fractional active area, an important consideration for spatial light modulation and for bright, high-density displays such as are used in high-definition television applications. <IMAGE></p> |
