Charged particle beam system and cooling device, a coil comprising a cooling member and a cooling member for use in such a charged particle beamsystem.

摘要

A charged particle beam system utilizes a box-shaped cooling member accommodating the lens in order to cool the particle-optical lenses. The cooling medium is circulated between the wall of the lens and the wall of the cooling member, enabling a high transfer of heat by convection. By using a cooling liquid which is undersaturated for air and which is heated prior to its passage through the cooling duct, accumulation of air due to heating can be prevented in the cooling member. <IMAGE>