Apparatus for ion-plasma machining workpiece surfaces.

摘要

An apparatus for ion-plasma machining workpiece surfaces comprises a vacuum chamber (1) accommodating a source (2) of ion flow orientated toward the surface being machined, and a system (3) for decelerating the ion flow with closed electron drift. The system (3) includes a shielding electrode (5) with a hole for the passage of the ion flow to the machining zone, and a decelerating electrode (6) insulated from the walls of the vacuum chamber (1) and from the shielding electrode (5) and fabricated from a non-magnetic material, and a magnetic system made up of at least one pair of magnetic elements (7). The decelerating electrode (6) is positioned between the magnetic elements (7), this decelerating electrode (6) carrying at least one workpiece (4) being machined, vectors ( @ ) of magnetization of the magnetic elements (7) of each pair being orientated relative to each other and to the surface of the decelerating electrode (6) so that vector ( @ ) of induction of magnetic field is parallel with the surface of the decelerating electrode (6). <IMAGE>