Process for forming a coating on a substrate using a silsesquioxane resin

摘要

The present invention provides a relatively simple synthesis procedure for the formation of silane hydrolyzate compositions of the formula <IMAGE> where R is hydrogen or a methyl group, n is an integer greater than about 8, and x is a number between 0 and 2. The hydrolyzate compositions are metastable in solvent solution, but become insoluble after coating on a substrate. The resins are useful as planarizing coatings for substrates such as electronic devices and can be ceramified by subjecting them to an oxidizing atmosphere at a temperature of between about 100 DEG to 1000 DEG C. to form ceramic or ceramic-like coatings on such substrates.