| 摘要 |
PURPOSE:To realize massproduction of a large area solar cell having a high non-electric conversion efficiency by measuring by in-process surface roughness of a belt member in the space after the substrate processing space and then continuously manufacturing substrates by determining control parameters using a result of measurement. CONSTITUTION:A bobbin 104 to which a striped member 101 having completed degreasing and rinsing is wound is set to a vacuum vessel 102 and adjustment of tension is conducted to eliminate slacking up to the vacuum vessel 103. Thereafter, vacuum vessels 102, 103, 120, 122 are evacuated. Next, when sufficient degassification is conducted, gas is respectively introduced into sputtering devices 120 and 122. When internal pressure is tabilized, a thin film is formed on a striped member and simultaneously roughness of recessed and protruding areas at the surface of striped member is measured with the surface roughness measuring means 121 while keeping the interval between the white light irradiating and reflected light receiving area 129 and the striped member 101. The surface temperature of striped member at the time of forming a thin film is controlled depending on the result of such measurement. As a result, a solar cell substrate having uniform and highly reproducibility for a large area can be obtained. |
