发明名称 |
APPARATUS FOR FORMING, CORRECTING PATTERN |
摘要 |
A means is employed to blow a gas for forming a conductive film and a gas for forming an insulating film onto the surface of a specimen while it is being irradiated with an ion beam, in order to easily and quickly form a small conductive pattern and an insulating pattern in a laminated manner, and a means is employed to cut a pattern by the irradiation with an ion beam and to form a new electrically conductive pattern by blowing a gas while the pattern is being irradiated with the ion beam in order to accomplish an electric connection between the patterns, making it possible to locally cut or connect tiny patterns.
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申请公布号 |
US5086230(A) |
申请公布日期 |
1992.02.04 |
申请号 |
US19880244128 |
申请日期 |
1988.09.14 |
申请人 |
SEIKO INSTRUMENTS & ELECTRONICS LTD. |
发明人 |
ADACHI, TATSUYA;YAMAMOTO, MASAHIRO |
分类号 |
C23C16/04;C23C16/48;G01Q30/04;G01Q30/08;H01J37/317 |
主分类号 |
C23C16/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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