| 摘要 |
PURPOSE:To inspect the notch of a pattern, etc., with high accuracy by image- picking up an image by superimposing the discrimination pattern of an inspection mask on a pattern to be inspected, and detecting whether or not a pattern constitutional part or a background part exists in the image. CONSTITUTION:A wiring board 2 is introduced to the visual field of an image pickup device, and is positioned just underneath the inspection mask 6. The image pickup device image-picks up the wiring board 2 via the inspection mask 6, and the image is fetched in an image processing device. In the inspection mask 6, a transparent part 23 corresponds to the pattern constitutional part 19 of the wiring board 2, and an opaque part 24 to the background part 22, and the opaque part 24 is set in a color approximated to that of the pattern constitutional part 19, therefore, the whole part is colored with the color of the pattern constitutional part 19 if no notch 20 exists in the wiring board 2. Also, when the notch 20 exists in the wiring substrate 2, the color area 28 of the background area 22 appeares in the color area of the pattern constitutional part 19. |
