| 摘要 |
PURPOSE:To prevent the remaining of development in a non-image part, to enhance the sharpness at a pattern edge part and to shorten a developing time by using an aqueous solution incorporating at least a kind of a specified quarternary ammonium salt at a specific ratio as a developer. CONSTITUTION:The developer is used, which consists of an aqueous solution incorporating at least one kind of the quarternary ammonium salt of 0.01-1wt.% represented with formula 1. In formula 1, R1-R4 are a C1-6 alkyl group or hydroxyalkyl group which may be same or not same. The concentration is preferred to be 0.01-1.5wt.%, particularly to be 0.05-0.5wt.% and if it is less than this range, the developing time is required more and if over the range, it becomes low sensitivity and besides the development latitude becomes narrower. Thus the improved negative pattern is obtained at a short developing time, the working efficiency is improved and the remaining of development in the non-image part is sufficiently improved. |
