SPUTTERING METHOD AND DEVICE,申请号JP19900138115-传众专利搜索

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发明名称	SPUTTERING METHOD AND DEVICE
摘要
申请公布号	JPH0432563(A)	申请公布日期	1992.02.04
申请号	JP19900138115	申请日期	1990.05.28
申请人	ANELVA CORP	发明人	SAHASE HAJIME;ADACHI TOSHIO
分类号	C23C14/34;H01L21/203	主分类号	C23C14/34
代理机构		代理人
主权项
地址

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