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发明名称
Electron beam lithography machine
摘要
申请公布号
GB0126977(D0)
申请公布日期
2002.01.02
申请号
GB20010026977
申请日期
2001.11.09
申请人
LEICA MICROSYSTEMS LITHOGRAPHY LTD
发明人
分类号
H01L21/68
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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