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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0430425(A)
申请公布日期
1992.02.03
申请号
JP19900135654
申请日期
1990.05.25
申请人
FUJITSU LTD
发明人
MISAWA NOBUHIRO;OBA TAKAYUKI;SUZUKI TOSHIYA;HARA SHIGE
分类号
H01L21/28;H01L21/285
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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