| 发明名称 |
MICROSCOPIC TUBE FORMING METHOD |
| 摘要 |
An ultrafine tube is produced by a method comprising the steps of applying a highly polymerized material on a substrate to form a resist layer on a surface of said substrate, applying a laser beam to the resist layer under such a condition that said resist layer is melted to form an ultrafine tube between the substrate and resist layer in the predetermined pattern. |
| 申请公布号 |
KR920001030(B1) |
申请公布日期 |
1992.02.01 |
| 申请号 |
KR19880005659 |
申请日期 |
1988.05.16 |
| 申请人 |
SANYO DENKI CO., LTD. |
发明人 |
SZINOGA, ICHI;HAMADA, YU-ZI;SAKADA, AICHI;FUJI, GOSOKU;KUWANO, GODOKU |
| 分类号 |
C25D7/00;B05D3/06;B23K26/00;B29C49/00;B29C49/58;B29C67/00;B29D23/00;G02B6/13;G03F7/00;G03F7/26;H01L21/027;H01L23/473;(IPC1-7):H01L21/00 |
主分类号 |
C25D7/00 |
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