| 摘要 |
<p>PURPOSE:To attenuate vibration of a driven body effectively by arranging a damper at the position where phase is deviated from the position of an actuator of the driven body in an object positioning device of an exposure burning device which is used in the semiconductor lithography process. CONSTITUTION:When a command voltage is applied to a piezo-electric device 2, a driven body 1 is positioned in up and down direction and tilt direction. The driven body 1 is also positioned at an arbitrary position in X-Y plane by X-Y stage 9. The amount of displacement of the driven body 1 is measured by a non-contact displacement gauge 6 and feedback controlled from an external controller by its output. Highly accurate positioning becomes possible for target plane because the displacement gauge 6 is arranged opposingly to a reference plane 10a. Also, it becomes possible to attenuate vibration which occurs when start of the X-Y stage 9 is stopped, residual vibration due to the piezo-electric device 2, and vibration due to external disturbance effectively because a damping rubber 12 as a member for damper is arranged.</p> |
