| 摘要 |
PURPOSE:To obtain the sensor which is robust and highly durable and is free from unequalness is measurement accuracy by providing a recessed part on the surface of a protective structural body to house an electrochemical sensor therein and providing a sensitive film to a specified material on the sensitive part. CONSTITUTION:The entire surface of the protective structural body 1 consisting of a silicon wafer is coated with a silicon oxide film 1a to electrically insulate a semiconductor sensor 3 housed in the recessed part 2 from the outside. The sensor 3a with its gate surface 3a positioned to face upward is housed in the recessed part 2 and a sensitive film 4 is applied on the surface thereof. The durability is improved and the unequalness in the measurement accuracy is prevented. |
