| 摘要 |
<p>PURPOSE:To simplify a structure by providing a rotor having a predetermined diameter corresponding to a plurality of arms, extending a rotation moving medium between the rotor and the arms, and varying steplessly an interval of the arms by the rotation of the rotor. CONSTITUTION:A motor 11 is so rotated at five arms 2 of an arm mechanism 25 that an interval of the arms 2 becomes the same as the pitch of the grooves of a carrier 30. The arms 2 are inserted between wafers contained in the carrier 30 by the movement of an elevation mechanism 26 and a horizontally rotating mechanism 27. The mechanism 26 is moved 2mm upward, a wafer 1 is engaged to be contained in the recess 15 of the arm 2, and removed by the carrier 30. Then, at the five arms 2, the motor 11 is so rotated that the interval of the arms 2 becomes the same as the groove pitch of a boat 34. The mechanism 25 is disposed in front of the boat 34 by the movements of the mechanisms 26, 27. The arms 2 are so moved that the wafer 1 is engaged with the groove of the boat 34, the mechanism 26 is moved down 2mm, and the wafers 1 are placed to be contained in the boat 34. Thus, an inexpensive device can be obtained by a simple structure.</p> |
