发明名称 THERMO-COMPRESSION BONDING METHOD AND THERMO- COMPRESSION BONDING APPARATUS
摘要 PROBLEM TO BE SOLVED: To improve yield of products by adequately dealing with manufacturing errors of an electronic component formed in a smaller size in prospect of elongation by a thermo compression bonding. SOLUTION: In the thermo compression bonding method and apparatus, before thermo-compression bonding an outer lead 54 formed on a film carrier 52 where the quantity of elongation thereof changes in response to a thermo compression bonding condition to an electrode 58 formed on a transparent plate 56, the positions of a first mark MA and a second mark MB formed on the film carrier 52 are measured. Then, the distance between these marks is obtained, and the thermo-compression bonding condition is determined on the basis of this obtained distance, and the thermo-compression bonding is performed under the determined condition.
申请公布号 JP2002261117(A) 申请公布日期 2002.09.13
申请号 JP20010386431 申请日期 2001.12.19
申请人 SHIBAURA MECHATRONICS CORP 发明人 MIYAMOTO TAKEHIKO
分类号 G02F1/13;G02F1/1345;H01L21/60;H05K3/32;(IPC1-7):H01L21/60;G02F1/134 主分类号 G02F1/13
代理机构 代理人
主权项
地址