| 摘要 |
PROBLEM TO BE SOLVED: To prevent the occurrence of a trouble, such as vibrations, etc., caused by the temperature-control system of a chamber surrounding an exposure stage. SOLUTION: Compressed air is produced by compressing outdoor air by means of a compressor 21 positioned separately from the chamber 2 surrounding the exposure stage 1, stored in an accumulator 24, and introduced to an expansion room 28 from the accumulator 24 through a buffer tank 27 and an expansion valve 28a. In the room 28, the compressed air is returned to normal-pressure air and the temperature of the air is controlled by means of a heater 29. Then the temperature-controlled air is supplied to the chamber 2. The occurrence of pressure losses is prevented by transporting the air in the compressed state, and the propagation of mechanical vibrations is prevented by separating the compressor 21 from the chamber 2.
|
