| 摘要 |
PURPOSE:To efficiently extract a binder and to reduce the amt. of carbon remaining in a ceramic substrate by increasing or decreasing the supply of a reducing gas based on the gas concn. in a calcining furnace estimated from the brightness. CONSTITUTION:A multilayer ceramic substrate 3 placed on a belt 4 is introduced into a calcining furnace 2 through a purge part 8, heated by a heater at the heating part 9 and calcined. The gas generated from the substrate 3 is introduced into a detection part 14 from a gas inlet part 13 consisting of the stainless steel pipe 11 and quartz pipe 12 of a gas detection part 7 provided close to a gas discharge port 6 and irradiated with the light from its source 15 through a lens 16. The quantity of light on a light receiving part 17 is inputted to a control part 18, and the brightness of the furnace gas is compared with the previously inputted value. When the light quantity is decreased below the reference quantity of the control part 18, the supply of a reducing gas 1 from a gas supply part 5 is increased. |
