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发明名称
ANNEALING METHOD FOR SEMICONDUCTOR WAFER AND ANNEALING JIG USED THEREFOR
摘要
申请公布号
JPH0424917(A)
申请公布日期
1992.01.28
申请号
JP19900125757
申请日期
1990.05.16
申请人
SUMITOMO ELECTRIC IND LTD
发明人
OTOBE KENJI
分类号
H01L21/26;H01L21/265
主分类号
H01L21/26
代理机构
代理人
主权项
地址
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