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发明名称	PARTICLE MONITOR SYSTEM AND METHOD
摘要
申请公布号	US5083865(A)	申请公布日期	1992.01.28
申请号	US19900522606	申请日期	1990.05.11
申请人	APPLIED MATERIALS, INC.	发明人	KINNEY, PATRICK;FISHKIN, BORIS;ZHAO, JUN;GUPTA, ANAND;BENDLER, ROBERT
分类号	G01N15/00;G01N15/14;G01N21/15;G01N21/53;G01N21/88;G01N21/956;H01L21/02;H01L21/205;H01L23/29;H01L23/31	主分类号	G01N15/00
代理机构		代理人
主权项
地址

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