摘要 |
PURPOSE:To reduce the ripple factor of discharge current, by fixing firing auxiliary rings around the outer wall of a discharge tube via electric insulator of 2-20mm in thickness. CONSTITUTION:Firing auxiliary rings 10a, 10b are fixed to a discharge tube via electric insulator 12 thicker than or equal to 2mm, and the influence of electric field generated by the rings 10a, 10b are decreased, thereby reducing the ripple factor of discharge current and stabilizing laser output. However, when the thickness of the electric insulator exceeds 20mm, firing potential increases and the effect of the firing auxiliary rings is lost, so that firing failures occur. By arranging electric conductor 11a connecting the firing auxiliary ring 10a with an anode 2a or a cathode 3a in the manner in which the gap distance from the discharge tube surface is 2mm or above, the ripple factor of discharge current can be reduced. |