| 摘要 |
PROBLEM TO BE SOLVED: To obtain a linear motor having a rectangular tube annular coil capable of positioning with higher precision by making drive control possible in a direction other than that of a main drive shaft thereby making positional control possible of a component of the linear motor other than that in the direction of the main drive shaft. SOLUTION: The linear motor comprises a Y annular coil 3 wound around a stator yoke 5 in annular rectangular tube shape about the main drive shaft, a Y moving element magnet 6 disposed oppositely, in plan view, to the Y annular coil 3 at a specified interval, an X annular coil 11 secured to the Y annular coil 3 through an insulating material 2, and an X moving element magnet 12 disposed oppositely, in plan view, to the X annular coil 11 at a specified interval wherein the Y moving element magnet 6 can be driven in the direction of the main drive shaft by exciting the Y annular coil 3 and the X moving element magnet 12 can be driven in the direction perpendicular to the direction of the main drive shaft by exciting the X annular coil 11. COPYRIGHT: (C)2005,JPO&NCIPI |
