| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic holding device capable of enhancing parallel accuracy between a handled object and a holding surface. SOLUTION: This electrostatic holding device holds a held object 104 by applying prescribed voltage to an electrode surface used as the holding surface 103, to hold the held object 104 held in contact or lifted in a non-contact state by electrostatic force. An electrode support body 101 for supporting the holding surface 103 is provided with attitude control mechanisms 106, 107 functioning to adjust the inclination of the holding surface 103 to be parallel with the surface of the handled object 104. COPYRIGHT: (C)2005,JPO&NCIPI |
