MEASURING METHOD OF MOSFET GATE LENGTH,申请号JP19900129768-传众专利搜索

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发明名称	MEASURING METHOD OF MOSFET GATE LENGTH
摘要
申请公布号	JPH0425148(A)	申请公布日期	1992.01.28
申请号	JP19900129768	申请日期	1990.05.18
申请人	SEIKO INSTR INC	发明人	TAKAHASHI KATSUYUKI;NAKANISHI AKISHIGE
分类号	H01L29/78;H01L21/66	主分类号	H01L29/78
代理机构		代理人
主权项
地址

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