| 摘要 |
PURPOSE:To make it possible to simply and accurately detect dislocation of a compensating pallet for rough compensation at a compensating stage by detecting the dislocation by the use of a dummy electronic part. CONSTITUTION:A position of a dummy electronic part 7 is decided through a compensating pallet 5 for rough positioning of electronic parts on a two-dimensional movable compensating stage 4. Then, the dummy electronic part 7 is sucked and adsorbed by a nozzle 11 of a movable head 10, and thin dislocation of the parts 7 is measured by laser beam irradiation. As a result, dislocation of a compensating pallet of rough positioning, which compensates the position of supply electronic parts of an electronic supply division, can simply and accurately be detected. |
