| 摘要 |
<p>PURPOSE:To sufficiently ensure the retaining force of a body to be attracted by using AC voltage as an applied voltage, by a method wherein a dielectic member and electrodes are formed, and a base stand is constituted of elastic material. CONSTITUTION:A dielectic member 22 composed of plastic is arranged on a base stand 21 composed of elastic material. Three electrode layers 23A, 23B, 23C having the respective fan shapes of 120 deg. interval are buried in the dielectic member 22. When distortion like warp exists in a wafer 3 in the above constitution, the base stand 21 and the dielectric member 22 deform in accordance with the shape of the distortion of the wafer. Hence, when distortion like warp is present in the wafer 3, gaps are not generated between the wafer and the dielectric member 22 on the upper surface of a retaining part 2, and the attractive force larger than a specified value can be maintained.</p> |
