THIN FILM FORMATION APPARATUS,申请号JP19900123546-传众专利搜索

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发明名称	THIN FILM FORMATION APPARATUS
摘要
申请公布号	JPH0423320(A)	申请公布日期	1992.01.27
申请号	JP19900123546	申请日期	1990.05.14
申请人	FUJI ELECTRIC CO LTD	发明人	FURUYA MASAYASU
分类号	H01L21/203;H01L21/285	主分类号	H01L21/203
代理机构		代理人
主权项
地址

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