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发明名称
PLASMA PROCESSING EQUIPMENT
摘要
申请公布号
JPH0422122(A)
申请公布日期
1992.01.27
申请号
JP19900127494
申请日期
1990.05.17
申请人
SUMITOMO ELECTRIC IND LTD
发明人
WAKAMIYA KENJI;SHIRAKAWA FUTATSU
分类号
H01L21/302;H01L21/3065;H01L21/31
主分类号
H01L21/302
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代理人
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