| 摘要 |
PURPOSE:To detect a water leakage in its early stage and to reduce damage from the water leakage by a method wherein the title device is provided with a water leakage detecting sensor for detecting the water leakage in the interior of a laser oscillator and is provided with a water leakage comparison detecting device, which compares an output from this water leakage detecting sensor with a reference value and detects the presence and absence of the water leakage. CONSTITUTION:A water leakage detecting device is constituted of a water leakage detecting sensor (a temperature sensor) 27, an amplifier 29, a water leakage comparison detecting part (a temperature abnormality detecting part) 31 and a display part 33. The sensor 27 consists of electrodes 35 and 37, is provided on the inner wall around water in the interior of a laser oscillator main body 1 and outputs a detection signal having change characteristics of an electric resistance (OMEGA) to a temperature (%) to the amplifier 29. The amplifier 29 amplifies this detection signal and outputs the signal to the detecting part 31. The output from the amplifier 29 is inputted in the detecting part 31 and is compared with a setting signal, which is a reference value, in a temperature setting device 41. When the output exceeds the temperature setpoint, an abnormality of a water leakage is displayed by the lamp 33 at a display-ON interval via a resistor R and a transistor Tr. |
