| 摘要 |
PURPOSE:To obtain an oscillation wave motor having excellent abrasion resistance in which fluctuation of torque is suppressed by forming a slider of a composite resin having Rockwell hardness (HRM) in the range of 80-110 and forming the frictional face of an oscillator of a diffusion layer of an intermetallic compound so that the frictional face has Vickers number (Hv) in the range of 350-450. CONSTITUTION:An oscillator 2 is secured with a piezoelectric element group 1 on the rear and the surface thereof serves as a friction face. A mover 7 comprises a supporter 5 and a slider 6 boded onto the surface thereof. The slider 6 is formed as a composite resin layer and contacts with the sliding face of the oscillator 2. The composite resin layer is composed of a composite resin having Rockwell hardness (HRM) in the range of 80-110 whereas the frictional face of the oscillator 2 is formed of a diffusion layer of an intermetallic compound having Vickers number (Hv) in the range of 350-500. Consequently, a highly accurate and stable oscillation motor, where fluctuation of torque is suppresses and abrasion of the composite resin sliding face is retarded without causing any flaw on the frictional face of the oscillator, can be obtained. |
