| 摘要 |
PURPOSE:To make rapid observation by setting a sample to a stage in an arbitrary stage position, then resetting this stage to a measuring position in the case of continuous measurement o the samples of the same kind. CONSTITUTION:The stage 14 is set in a reference position and the sample S is imposed on the stage 14. A user focuses the sample S manually by using a lever 28 for roughly moving the stage. The focused position of the stage 14 is then stored as the measuring position for the sample S in a memory means. The sample S is subjected to the prescribed observation or measurement, such as inspection. The stage 14 is lowered after the end of the measurement and the sample S is exchanged with the next sample of the same kind. The stage 14 is exactly moved to the position storing the stage 14 by pushing an autofocusing key 20 of an operating key box 19. The above-mentioned operations are repeated and the measurement of the samples of the same kind is executed simply by pushing the autofocusing key 20. |
