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发明名称
METHOD AND APPARATUS FOR MEASURING THICKNESS OF EXTREMELY THIN FILM, AND INFRARED LAMP FOR THE MEASUREMENT
摘要
申请公布号
JPH0420804(A)
申请公布日期
1992.01.24
申请号
JP19900125762
申请日期
1990.05.16
申请人
JIYAPAN SENSAA KK
发明人
TAKADA HIDEO
分类号
G01B11/06
主分类号
G01B11/06
代理机构
代理人
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