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发明名称
ZERSTAEUBUNGSKATHODE
摘要
申请公布号
DE4022461(A1)
申请公布日期
1992.01.23
申请号
DE19904022461
申请日期
1990.07.14
申请人
LEYBOLD AG, 6450 HANAU, DE
发明人
CORD, BERNHARD, DR., 8755 ALZENAU, DE;MAASS, WOLFRAM, DR., 6455 ERLENSEE, DE
分类号
C23C14/35;C23C14/34;H01J37/32;H01J37/34
主分类号
C23C14/35
代理机构
代理人
主权项
地址
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