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发明名称
WAFER HOLDING MECHANISM
摘要
申请公布号
JPH0419952(A)
申请公布日期
1992.01.23
申请号
JP19900123585
申请日期
1990.05.14
申请人
NISSIN ELECTRIC CO LTD
发明人
FURUGUCHI EIGO
分类号
H01J37/317;H01L21/265
主分类号
H01J37/317
代理机构
代理人
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