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发明名称
ION IMPLANTATION
摘要
申请公布号
JPH0417327(A)
申请公布日期
1992.01.22
申请号
JP19900120618
申请日期
1990.05.10
申请人
NEC CORP
发明人
HANE MASAMI
分类号
H01L21/265;H01L21/203
主分类号
H01L21/265
代理机构
代理人
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