| 摘要 |
<p>Structure for vacuum sealing of a closed cavity by anodic welding of the lower periphery of a glass sheet (11) against the upper periphery of a silicon sheet (12). The glass sheet comprises, facing the cavity, an opening (21) passing through it and the silicon sheet comprises a paddle (22) arranged facing the opening. The paddle is integrally attached to at least a part of the silicon sheet by at least one silicon strip (23) which is sufficiently thin to be flexible. <IMAGE></p> |
