| 摘要 |
PURPOSE:To enable the first object to be aligned within a short time also to be carried without raising dust due to collision at all by a method wherein the slip in the patterns formed in the first object is detected and corrected in the carrier route. CONSTITUTION:A carrier mechanism 6 is shifted to the position of a reticle container part 3 along a guide 7 so as to hold a reticle 1 by a reticle hand 4. Next, the reticle 1 is shifted to the position of a position detecting part 8 along the guide 7 to illuminate alignment masks 2 with a light source 17 on that position through a condenser lens 16, a half-mirror 15 and an object lens 14 so that the optical path of the reflected rays may be bent making an angle of 90 deg. to focus the reflected rays on the surface whereon a reference mark 18 is made. Next, the reference mark 18 and the reflected images of the marks 2 are focused on a detector 20 by a focusing lens 19 to detect any position slips so that those focused position slips may be corrected by driving the reticle hand 4 in the lateral, vertical and longitudinal directions by a driving part 5. Finally, the reticle 1 is shifted by the carrier mechanism 6 to be delivered to a reticle holding part whereat the reticle 1 is normally vacuum-sucked to be held in that position. |
