发明名称 Lithographic apparatus, device manufacturing method and energy sensor
摘要 An energy sensor, e.g. as part of a transmission image sensor comprises: a radiation-sensitive detector arranged to receive a pulsed radiation beam and to generate a current in response thereto; a circuit equivalent to an RC network connected across the radiation-sensitive detector; and an analog to digital converter connected across a resistive component of the circuit and arranged to output digital samples measuring the voltage across the resistive component at a sampling rate that is greater than the pulse repetition rate of the pulsed radiation beam.
申请公布号 US2007201013(A1) 申请公布日期 2007.08.30
申请号 US20060363276 申请日期 2006.02.28
申请人 ASML NETHERLANDS B.V. 发明人 VENEMA WILLEM J.
分类号 G03B27/72 主分类号 G03B27/72
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