| 摘要 |
PURPOSE:To prevent vibration resonance with an equipment substrate by providing a support which consists of a large-bore pedestal cylindrical body where a small-bore cylinder which supports an inner-periphery edge part of a ultrasonic vibrator at its upper-edge part is placed at a hollow circular plate part and where a plurality of flex slits are formed at a peripheral wall of the small-bore cylinder and at a peripheral part of the hollow circular plate part. CONSTITUTION:A support 12 is formed, where a small-bore cylinder 7 which is fit into an upper edge part 6 for supporting an inner-periphery edge part 5 of an ultrasonic vibrator which consists of an elastic body 1 and an electrostrictive element 2 of a motor device is placed at a hollow circular plate part 9 of a large-bore pedestal cylindrical body 8 and a plurality of flex slits 11 are formed at a peripheral wall 10 of a small-bore cylinder 7 and at an inner-periphery part of the hollow circular plate part 9 of the large-bore pedestal cylindrical body 8. It is desirable that the flex slits 11 of this support may be equally divided an even equal distribution such as 12 and 24. |
