| 摘要 |
PURPOSE:To embed and produce the optical waveguide by one time of ion diffusion by depositing a 1st thin film and a 2nd thin film and transplanting and diffusing a 1st ion and a 2nd ion into a light transmissive substrate. CONSTITUTION:The 1st thin film 2 contg. the 1st ion to increase the refractive index of the light transmissive substrate 1 and has the prescribed optical waveguide pattern when transplanted into the light transmissive substrate 1 is formed. The 2nd thin film 4 contg. the 2nd ion to lower the refractive index than at least the refractive index in the state of contg. the 1st ion in the state of contg. the 1st ion when transplanted into the light transmissive substrate 1 is formed on the light transmissive substrate 1. The 1st ion and the 2nd ion are transplanted and diffused into the light transparent substrate, by which the formation of the optical waveguide 8 and the embedment thereof are executed. Since the formation and embedment of the optical waveguide 8 are executed by one time of the transplantation and diffusion in this way, the production process is simplified. The optical waveguide having an adequate sectional shape is obtd. |
