发明名称 PROCESS FOR PRODUCING CERAMIC-METAL MULTILAYER COMPONENTS AND APPARATUS FOR CARRYING OUT THE PROCESS
摘要 The invention concerns the production of ceramic-metal multilayer components comrising effecting, after making up in the crude state, in particular by metallization and stacking of pre-cut raw ceramic bands, a simultaneous firing operation, termed cofiring, on the components under an atmosphere based on hydrogen or nitrogen or a mixture of hydrogen and nitrogen, having a regulated water vapor content at a temperature of first of all between 800 DEG C. and 1800 DEG C., and more precisely either at a moderately high temperature plateau between 800 DEG C. and 1300 DEG C. for certain ceramic materials such as codierite and metallic materials such as copper and nickel, or at a temperature plateau between about 1400 DEG C. and 1800 DEG C. for refractory materials such as tungsten, molybdenum, alumina, according to which the atmosphere having a water vapor content is obtained by addition to a vector gas at (13) and (14) of a quantity of additional oxygen (15), and a quantity of additional hydrogen at (14) sufficient to obtain by hydrogen-oxidation reaction the predetermined water vapor content, and determining these quantities of addition of oxygen and the contingent addition of hydrogen so that said water vapor content is, in the course of the cofiring, that which is the most appropriate for the different stages of said cofiring.
申请公布号 US5082606(A) 申请公布日期 1992.01.21
申请号 US19900483182 申请日期 1990.02.22
申请人 L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE 发明人 ROTMAN, FREDERIC;RANCON, YANNICK;QUEILLE, PHILIPPE;OLIVIER, MICHEL
分类号 C04B41/45;C04B41/51;C04B41/81;C04B41/88;H01G4/12;H01L21/48;H01L23/12;H05K1/09;H05K3/46 主分类号 C04B41/45
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