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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0415926(A)
申请公布日期
1992.01.21
申请号
JP19900120724
申请日期
1990.05.09
申请人
FUJITSU LTD
发明人
ONO HIDEKI
分类号
H01L21/3205;H01L21/768
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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