发明名称 Integrated circuit having superconductive wirings
摘要 An integrated circuit having a superconductive wiring comprises a semiconductor substrate, an integrated circuit device formed on the semiconductor substrate and a wiring connected to the integrated circuit device. The wiring is formed of a superconductive material and has a wide portion for heat radiation. The manufacturing method of the same comprises the steps of preparing a semiconductor substrate, forming an integrated circuit device on the semiconductor substrate, and connecting a wiring having a wide portion for heat radiation and formed of a superconductive material to the integrated circuit device on the semiconductor substrate.
申请公布号 US5083188(A) 申请公布日期 1992.01.21
申请号 US19900618024 申请日期 1990.11.27
申请人 MITSUBISHI DENKI KABUSHIKI KAISHA 发明人 YAMAGATA, TADATO
分类号 H01L39/06;H01L21/3205;H01L23/36;H01L23/52;H01L23/532 主分类号 H01L39/06
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