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发明名称
METHOD AND APPARATUS FOR REMOVAL OF OXIDE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0414823(A)
申请公布日期
1992.01.20
申请号
JP19900119392
申请日期
1990.05.08
申请人
MITSUBISHI ELECTRIC CORP
发明人
ISHIDA TOMOAKI
分类号
H01L21/302;H01L21/28;H01L21/3065;H01L21/3205;H01L21/768;H01L23/52
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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