| 摘要 |
PURPOSE:To exactly detect the floating of a lead by detecting height of three points of the lead by irradiating toward the lead of electronic parts with a laser light from a laser equipment. CONSTITUTION:Electronic parts 2 are positioned in the upper part of a laser equipment 9 and while moving horizontally a moving head 7 in the X and Y directions, each lead 2a is irradiated with a laser light, and its reflected light is photodetected to photodetecting parts 11, 12, by which height Zi from the reference surface S of each lead 2a is detected. Subsequently, three pieces of leads 2a are selected suitably, and from height Z1 - Z3 of reflection points P1 - P3 of these leads 2a, height Z0 of a virtual plane K containing these three points P1 - P3 is calculated. Next, by deriving a difference of elevation Z = Zi - Z0 between the height Zi of each lead 2a and the height Z0 of the virtual plane K, floating of each lead 2a is detected. |
