MANUFACTURE OF COMPOUND SEMICONDUCTOR SUBSTRATE,申请号JP19900118119-传众专利搜索

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发明名称	MANUFACTURE OF COMPOUND SEMICONDUCTOR SUBSTRATE
摘要
申请公布号	JPH0414214(A)	申请公布日期	1992.01.20
申请号	JP19900118119	申请日期	1990.05.07
申请人	SUMITOMO METAL IND LTD	发明人	FUJITA KAZUHISA
分类号	H01L21/205;H01L21/20	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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