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发明名称	APPARATUS AND METHOD FOR RESIST COATING
摘要
申请公布号	JPH0414813(A)	申请公布日期	1992.01.20
申请号	JP19900119090	申请日期	1990.05.08
申请人	FUJITSU LTD	发明人	NAKAGAWA TAKASHI
分类号	G03F7/16;B05C11/08;B05D1/40;H01L21/027	主分类号	G03F7/16
代理机构		代理人
主权项
地址

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