GETTER PUMP AND VACUUM COATING INSTALLATION COMPRISING A GETTER PUMP

摘要

The invention relates to a highly efficient getter pump with low maintenance requirements and to a vacuum coating installation, in the vacuum chamber of which an ultra-high vacuum can be generated, thus allowing the substrate to be coated to remain uncontaminated by a dusting of getter material. The getter pump according to the invention comprises a pump housing (5) with an exposure opening (7). Said pump housing (5) is provided with a getter body (8), which consists of getter material, essentially closes the exposure opening (7) and is located so that it can move in relation to the exposure opening (7). An inner sub-section of the surface of the getter body (8) points towards the interior of the pump housing (5) and an outer sub-section of the surface of the getter body (8) points towards the exterior of the pump housing (5) through the exposure opening (7), the positions of the inner and outer sub-section of the surface of the getter body (8) being interchangeable by the movement of the getter body (8). The getter pump is characterised in that it is equipped with a removal device (9) for removing getter material from the inner sub-section of the surface of the getter body (8). The vacuum coating installation according to the invention comprises at least one getter pump of this type.