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发明名称
SEMICONDUCTOR ACCELERATION SENSOR
摘要
申请公布号
JPH0413974(A)
申请公布日期
1992.01.17
申请号
JP19900116468
申请日期
1990.05.02
申请人
MITSUBISHI ELECTRIC CORP
发明人
SESEKURA TAKASHI;TSUGAI MASAHIRO;BESSHO MIKIO
分类号
G01P15/12;H01L29/84
主分类号
G01P15/12
代理机构
代理人
主权项
地址
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